Physics of Submicron Lithography

Name: Physics of Submicron Lithography
Author: Valiev, K. A.
ISBN: 9780306435782

by Valiev, K. A.

Marketplace Prices
New from $171.17

New
$171.17

List Price

~~$209.00~~

Discount

18% Off

You Save

$37.83

Item Details
Condition: New
Provider: gridfreed Contact
Provider Rating:

69%
Ships From: San Diego, CA
Shipping: Standard
Comments: New. In shrink wrap. Looks like an interesting title!

ISBN-13: 9780306435782
ISBN: 0306435780
Publisher: Springer

AUTHOR

Valiev, K. A.

SUMMARY

This monograph details the physics behind the methods of generating submicron forms for electron beam, ion beam, optical, and X-ray lithography. Topics are discussed at the level of analytical theory, allowing a study of scientific issues in the field without frequent reference to a general physics text.Valiev, K. A. is the author of 'Physics of Submicron Lithography' with ISBN 9780306435782 and ISBN 0306435780.

[read more]